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¿ÆÑÐЧ¹û£¨½üÎåÄ꣩£º£º£º [1] Tang J , Liu L , Jiang L , et al. A harmless thin film elastic modulus measurement method through bending the nonlinear sliding cantilever beam[J]. Measurement, 2021, 175. [2]ÁúÖÜ, ÌÀ½¡»ª, ½Àø,µÈ. Á½ÂÖ×ÔƽºâС³µ½¨Ä£¼°LQR¿ØÖÆËã·¨Éè¼Æ[J]. »úµç¹¤³ÌÊÖÒÕ, 2021, 50(9):6. [3]ÁõÀÖÕÂ, ½Àø, ÌÀ½¡»ª. »ùÓڹǼܵÄÆø¶¯ÈíÌå·ÂÈËÊÖÖ¸Éè¼ÆÓë·ÂÕæÆÊÎö[J]. »úе¹¤³Ìʦ, 2021(9):3. [4]ÁõÀÖÕÂ, ½Àø, ÌÀ½¡»ª. »ùÓڹǼܵÄÆø¶¯ÈíÌå·ÂÈËÊÖÖ¸Éè¼ÆÓë·ÂÕæÆÊÎö[J]. »úе¹¤³Ìʦ, 2021(9):3. | 
